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Akụkụ seramiiki nke Alumina dị elu nke alumina
E ji igwe na-eme ka ihe dị n'ime seramiiki dị nro ma na-eme ka ọ dị ọcha n'okpuru okpomọkụ dị elu, wee jiri ya mee ihe nke ọma, akụkụ seramiiki ndị ahụ nwere ike imezu ihe achọrọ siri ike nke ngwaọrụ semiconductor, ya na atụmatụ ya dịka iguzogide iyi, iguzogide nchara, obere mgbasawanye okpomọkụ, na mkpuchi. Seramiiki nwere ike ịrụ ọrụ n'ọtụtụ ụdị ngwa mmepụta semiconductor nwere oke okpomọkụ, ikuku ma ọ bụ gas na-emebi emebi ruo ogologo oge.
Ejiri ntụ ntụ alumina dị ọcha mee ya, nke a na-eji ịpị isostatic oyi, imecha okpomọkụ dị elu na imecha ihe ziri ezi, ọ nwere ike iru nha nha ruo ±0.001 mm, imecha elu Ra 0.1, iguzogide okpomọkụ 1600℃.
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Ngwa Semiconductor ahaziri ST.CERA Seramiiki Chucks
E ji igwe na-eme ka ihe dị n'ime seramiiki dị nro ma na-eme ka ọ dị ọcha n'okpuru okpomọkụ dị elu, wee jiri ya mee ihe nke ọma, akụkụ seramiiki ndị ahụ nwere ike imezu ihe achọrọ siri ike nke ngwaọrụ semiconductor, ya na atụmatụ ya dịka iguzogide iyi, iguzogide nchara, obere mgbasawanye okpomọkụ, na mkpuchi. Seramiiki nwere ike ịrụ ọrụ n'ọtụtụ ụdị ngwa mmepụta semiconductor nwere oke okpomọkụ, ikuku ma ọ bụ gas na-emebi emebi ruo ogologo oge.
Ejiri ntụ ntụ alumina dị ọcha mee ya, nke a na-eji ịpị isostatic oyi, imecha okpomọkụ dị elu na imecha ihe ziri ezi, ọ nwere ike iru nha nha ruo ±0.001 mm, imecha elu Ra 0.1, iguzogide okpomọkụ 1600℃.
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Ihe na-eme ka ihe na-eme ka seramiiki nke Silicon Carbide (SiC) sie ike - Ike siri ike maka njikwa Wafer dị elu
A na-eji ihe S1111 mee ihe na seramiiki nke St.Cera's Sera's seramiiki effector site na iji ihe dị elu nke silicon carbide (ọdịnaya SiC bụ 99.72%, Si 0.05%). Ọ na-enye ihe pụrụ iche nke igwe: ike flexural 449 MPa (a tụrụ), modulus elastic 457 GPa (a tụrụ), na ike Vickers 25–28 GPa (a tụrụ). Njupụta dị ala (3.10–3.15 g/cm³, a na-ahụkarị) na-enye ike pụrụ iche, nke dị mma maka robot ndị na-ebufe wafer dị elu. Site na ike okpomọkụ nke 120–150 W/m·K (a tụrụ) na oke mgbasawanye okpomọkụ nke 4.0–4.5×10⁻⁶/℃ (a tụrụ), ihe na-eme njedebe a na-ewepụ okpomọkụ nke ọma ma na-eme ka nha nha kwụsie ike n'oge njikwa okpomọkụ dị elu (ruo 1600–1700°C, enweghị ibu). Agba ojii/isi awọ na enweghị mmiri na-eme ka ụlọ dị ọcha dakọtara.
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Igwe eji ekpo ọkụ nke Silicon Carbide (SiC) dabere na ya maka gburugburu ebe okpomọkụ dị elu na Plasma
A na-eji ígwè silikọn carbide dị ọcha (batch S1111, SiC 99.72%, Si 0.05%) emepụta chuck seramiiki nke St.Cera's SiC. Ọ na-enye ike mgbanwe nke 449 MPa, ike mgbawa nke 3.12 MPa·m¹/², na modulus na-agbanwe agbanwe nke 457 GPa. Nhazi okpomọkụ nkịtị nke ihe ahụ (120–150 W/m·K) na obere mgbasawanye okpomọkụ (4.0–4.5×10⁻⁶/℃) na-eme ka mmụba okpomọkụ ngwa ngwa na obere wafer warpage n'oge okirikiri okpomọkụ. Enwere ike ịhazi chuck ahụ dị ka chuck vacuum porous (usoro gas na-efe efe) ma ọ bụ chuck ọkọlọtọ a gwuru gbubiri. Site na okpomọkụ kachasị eji nke 1600–1700°C (enweghị ibu) na iguzogide mbuze plasma pụrụ iche, chuck a dị mma maka nhazi wafer dị elu (annealing, RTP) na ụlọ etch siri ike ebe chuck alumina na-emebi.
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Ngwa Semiconductor Akụkụ Seramiiki Ndị Na-ebu Seramiiki
E ji igwe na-eme ka ihe dị n'ime seramiiki dị nro ma na-eme ka ọ dị ọcha n'okpuru okpomọkụ dị elu, wee jiri ya mee ihe nke ọma, akụkụ seramiiki ndị ahụ nwere ike imezu ihe achọrọ siri ike nke ngwaọrụ semiconductor, ya na atụmatụ ya dịka iguzogide iyi, iguzogide nchara, obere mgbasawanye okpomọkụ, na mkpuchi. Seramiiki nwere ike ịrụ ọrụ n'ọtụtụ ụdị ngwa mmepụta semiconductor nwere oke okpomọkụ, ikuku ma ọ bụ gas na-emebi emebi ruo ogologo oge.
Ejiri ntụ ntụ alumina dị ọcha mee ya, nke a na-eji ịpị isostatic oyi, imecha okpomọkụ dị elu na imecha ihe ziri ezi, ọ nwere ike iru nha nha ruo ±0.001 mm, imecha elu Ra 0.1, iguzogide okpomọkụ 1600℃.
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Mgbaaka Alumina Ceramic nke ejiri ígwè mee maka ngwa mgbachi siri ike
Mgbaaka igwe alumina nke St.Cera ji ígwè agwakọta akwa alumina dị ọcha nke ukwuu (99.8% Al₂O₃) yana nkwado ígwè a na-eji ígwè eme ihe nke ọma (karịsịa aluminom ma ọ bụ ígwè anaghị agba nchara). Nhazi ngwakọ a na-enye nguzogide pụrụ iche na enweghị ike nke seramiiki na elu igwe, ebe ntọala ígwè ahụ na-agbakwụnye ike igwe, ịdị mfe itinye, na iguzogide mgbawa gbajiri agbaji. Oyi akwa alumina na-enye ike flexural nke 361 MPa, ike Vickers nke 16 GPa, na nkwụsi ike okpomọkụ ruo 800°C. A na-ahazi ntọala ígwè ahụ site na oghere ndị a na-etinye, mkpọ ịchọta, ma ọ bụ ihe ndọta maka itinye aka na igwe na-egweri ihe, igwe na-egweri ihe dị n'ụwa, na ngwa CMP.
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Akụkụ Seramiiki maka Ngwa Ọdụ Nnyocha Semiconductor
E ji igwe na-eme ka ihe dị n'ime seramiiki dị nro ma na-eme ka ọ dị ọcha n'okpuru okpomọkụ dị elu, wee jiri ya mee ihe nke ọma, akụkụ seramiiki ndị ahụ nwere ike imezu ihe achọrọ siri ike nke ngwaọrụ semiconductor, ya na atụmatụ ya dịka iguzogide iyi, iguzogide nchara, obere mgbasawanye okpomọkụ, na mkpuchi. Seramiiki nwere ike ịrụ ọrụ n'ọtụtụ ụdị ngwa mmepụta semiconductor nwere oke okpomọkụ, ikuku ma ọ bụ gas na-emebi emebi ruo ogologo oge.
Ejiri ntụ ntụ alumina dị ọcha mee ya, nke a na-eji ịpị isostatic oyi, imecha okpomọkụ dị elu na imecha ihe ziri ezi, ọ nwere ike iru nha nha ruo ±0.001 mm, imecha elu Ra 0.1, iguzogide okpomọkụ 1600℃.
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Nhazi ahaziri nke Al2O3 Efere Wafer Chuck
E ji igwe na-eme ka ihe dị n'ime seramiiki dị nro ma na-eme ka ọ dị ọcha n'okpuru okpomọkụ dị elu, wee jiri ya mee ihe nke ọma, akụkụ seramiiki ndị ahụ nwere ike imezu ihe achọrọ siri ike nke ngwaọrụ semiconductor, ya na atụmatụ ya dịka iguzogide iyi, iguzogide nchara, obere mgbasawanye okpomọkụ, na mkpuchi. Seramiiki nwere ike ịrụ ọrụ n'ọtụtụ ụdị ngwa mmepụta semiconductor nwere oke okpomọkụ, ikuku ma ọ bụ gas na-emebi emebi ruo ogologo oge.
Ejiri ntụ ntụ alumina dị ọcha mee ya, nke a na-eji ịpị isostatic oyi, imecha okpomọkụ dị elu na imecha ihe ziri ezi, ọ nwere ike iru nha nha ruo ±0.001 mm, imecha elu Ra 0.1, iguzogide okpomọkụ 1600℃.
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Ngwa Semiconductor ahaziri ahazi nke ST.CERA Efere seramiiki
E ji igwe na-eme ka ihe dị n'ime seramiiki dị nro ma na-eme ka ọ dị ọcha n'okpuru okpomọkụ dị elu, wee jiri ya mee ihe nke ọma, akụkụ seramiiki ndị ahụ nwere ike imezu ihe achọrọ siri ike nke ngwaọrụ semiconductor, ya na atụmatụ ya dịka iguzogide iyi, iguzogide nchara, obere mgbasawanye okpomọkụ, na mkpuchi. Seramiiki nwere ike ịrụ ọrụ n'ọtụtụ ụdị ngwa mmepụta semiconductor nwere oke okpomọkụ, ikuku ma ọ bụ gas na-emebi emebi ruo ogologo oge.
Ejiri ntụ ntụ alumina dị ọcha mee ya, nke a na-eji ịpị isostatic oyi, imecha okpomọkụ dị elu na imecha ihe ziri ezi, ọ nwere ike iru nha nha ruo ±0.001 mm, imecha elu Ra 0.1, iguzogide okpomọkụ 1600℃.
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Chuck Alumina Vacuum nke Inch 12 maka nhazi Wafer 300mm
E ji alumina dị ọcha nke dị sentimita iri na abụọ nke St.Cera mepụta ihe mkpuchi vacuum nke dị sentimita iri na abụọ site na 99.8% nke alumina dị elu (Al₂O₃) maka ijikwa wafer 300mm. Chuck ahụ nwere elu dị larịị (obosara oghere 0.5–1.0 mm, pitch 2–3 mm) iji hụ na ekesara oghere ahụ n'otu nha n'obosara 300mm dum. A na-ejigide ịdị larịị n'ime 5 μm, na-eme ka a na-etinye wafer na-enweghị warp n'oge ịkpụ, ịkpụ azụ, na inyocha ya. Ike flexural dị elu nke ihe ahụ (361 MPa) na ike siri ike (16 GPa) na-ekwe nkwa nkwụsi ike ogologo oge ọbụlagodi n'okpuru usoro vacuum ugboro ugboro.
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Ihe na-eme ka ihe ... ọ dị mma nke alumina seramiiki nwere ọwa ikuku agbakwunyere
Ihe na-eme ka ihe dị n'ime alumina nke St.Cera na-ejikọta ọwa ikuku a na-eji ígwè arụ ọrụ nke ọma na oghere mmiri ozugbo n'ime ahụ alumina dị ọcha nke 99.8%. Nhazi a na-ewepụ ihe mkpuchi ikuku mpụta, na-eme ka ihe a na-akpọ wafer pikọp ozugbo na ike ijide otu. Ike flexural dị elu nke ihe ahụ (361 MPa) na ike siri ike (16 GPa) na-eme ka akụkụ ya kwụsie ike ogologo oge n'okpuru usoro ikuku ugboro ugboro. A na-ejigide ịdị larịị n'ofe ebe pad ahụ n'ime 10 μm, na-egbochi nrụgide wafer na mgbawa. Ọdụ ụgbọ mmiri ikuku dị na flange nrụnye azụ maka njikọta dị mfe na ogwe aka robot OEM.
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Akụkụ seramiiki alumina nke ESD-Chekwa maka njikwa Wafer na-adịghị agbanwe agbanwe
A na-emepụta akụkụ seramiiki alumina dị nchebe nke St.Cera's ESD (electrostatic discharge) site na 99.8% dị ọcha nke Al₂O₃ nwere nguzogide elu ahaziri nke 10⁶–10⁹ Ω/sq, nke a na-enweta site na usoro doping ma ọ bụ mkpuchi nkeonwe. Akụkụ ndị a na-ewepụ chajị kwụ ọtọ nke ọma, na-egbochi mmebi electrostatic na wafers na ngwaọrụ semiconductor dị nro. Ihe ndabere ahụ na-ejigide ike flexural dị elu ya (361 MPa), ike (16 GPa), na ike dielectric (15×10⁶ V/m). Akụkụ seramiiki nchekwa ESD gụnyere ihe ndị na-eme ihe njedebe, pin elu, rail nduzi, na ihe ndozi ahaziri maka akpaaka FAB.
