Chuck Alumina Vacuum nke Inch 12 maka nhazi Wafer 300mm
E ji alumina dị ọcha nke dị sentimita iri na abụọ nke St.Cera mepụta ihe mkpuchi vacuum nke dị sentimita iri na abụọ site na 99.8% nke alumina dị elu (Al₂O₃) maka ijikwa wafer 300mm. Chuck ahụ nwere elu dị larịị (obosara oghere 0.5–1.0 mm, pitch 2–3 mm) iji hụ na ekesara oghere ahụ n'otu nha n'obosara 300mm dum. A na-ejigide ịdị larịị n'ime 5 μm, na-eme ka a na-etinye wafer na-enweghị warp n'oge ịkpụ, ịkpụ azụ, na inyocha ya. Ike flexural dị elu nke ihe ahụ (361 MPa) na ike siri ike (16 GPa) na-ekwe nkwa nkwụsi ike ogologo oge ọbụlagodi n'okpuru usoro vacuum ugboro ugboro.
Nkọwapụta (dabere na 99.8% Al₂O₃):
| Akụ na ụba | Uru |
| Dayameta | 300 mm (inch iri na abụọ) |
| ihe | 99.8% Alumina (Ivory) |
| Njupụta | 3.93 g/cm³ |
| Ike nke Flexural | 361 MPa |
| Ike Vickers | 16 GPA |
| Ịdị larịị (karịa 300mm) | ≤5 μm |
| Obosara oghere | 0.5–1.0 mm |
| Oke okpomọkụ ọrụ kachasị | 800°C |
| Ike Dielectric | 15 × 10⁶ V/m |
Ngwa:
Mkpụcha na ide ihe wafer 300mm
Ịkpụcha azụ wafer (nkwado wafer dị gịrịgịrị)
Nnyocha anya na nyocha
Njikọ nwa oge/ịkwapụ ihe mkpuchi
Mmepụta:
A kụnyere CNC ma jiri wiil dayamọnd mee ya, hichaa ya nke ọma, ma tinye ya n'ime ụlọ nhicha nke klas 100. A na-enyocha 100% nke chuck ọ bụla maka ịdị larịị (laser interferometer) na omimi oghere (profilometer).
Uru:
Ọkpụkpụ obere ihe (≤0.05 ihe ndị dị na ya/cm²)
Ọ naghị abanye na kemịkalụ na ihe mgbaze na asịd
Elu dị nchebe maka ESD (njigide >10¹³ Ω·cm)
Ụdị oghere oghere pụrụ iche na ọdụ ụgbọ mmiri azụ dị.
