Efere seramiiki Alumina nke buru ibu maka Semiconductor na ihe eji arụ ọrụ ụlọ ọrụ
St.Cera na-emepụta efere seramiiki buru ibu site na 99.8% alumina dị ọcha nke ukwuu (Al₂O₃) yana oke nha ya ruru 1500mm n'ogologo na 600mm n'obosara. Ike igwe anyị na-egweri ihe nke ọma na-enweta ịdị larịị nke 0.003mm karịa 100mm na nha nha nke 0.002mm, na-ahụ na elu ya dị mma maka ngwa buru ibu. Ọkpụrụkpụ ya ruru 100mm, imecha elu ya ruo Ra0.1. Efere ndị a na-eje ozi dị ka ntọala ihe mkpofu, efere ihe na-ekpo ọkụ, panel mkpuchi eletriki, na ala ụlọ nhazi na semiconductor, ngosi, na mmepụta fotovoltaic. Enwere oghere dị n'ime ya, ihe mgbochi, na nhazi akụkụ.
Nkọwapụta (dabere na 99.8% Al₂O₃& ikike mmepụta St.Cera):
| Akụ na ụba | Uru |
| ihe | 99.8% Alumina (Ivory) |
| Njupụta | 3.93 g/cm³ |
| Ike nke Flexural | 361 MPa |
| Ike Vickers | 16 GPA |
| Ike Dielectric | 15 × 10⁶ V/m |
| Ogologo Kachasị | 1500mm |
| Obosara Kachasị Elu | 600mm |
| Oke ọkpụrụkpụ | 100mm |
| Nha dị larịị (kwa 100mm) | 0.003mm |
| Iyikọ yiri ibe ya | 0.002mm |
| Mmecha Elu | Ra0.1 (a na-ete/a na-etecha) |
| Oke okpomọkụ ọrụ kachasị | 1600°C |
Ngwa:
- · Efere ntọala nke chuck vacuum maka nnukwu wafers na panels
- · Platens maka ihe eji ekpo ọkụ maka ngwa nhazi okpomọkụ
- · Ogwe mkpuchi eletriki na sistemụ voltaji dị elu
- · Nhazi ala ụlọ na efere liner
Nhazi nke ọma:
Nhazi kwụ ọtọ: 0.005mm, perpendicularity: 0.005mm, ejiri laser interferometer kwado ya.
Uru karịa efere ígwè:
- · Enweghị mmetọ ígwè - dị oke mkpa maka usoro semiconductor
- · Enweghị gas na-apụ apụ - zuru oke maka gburugburu ikuku vacuum
- · Nnukwu iyi na iguzogide kemịkalụ
Nhazi:
Ụdị oghere ahaziri ahazi, profaịlụ akụkụ, elu steepụ, na ebe a na-etinye ígwè.
