Ejikọtara ya na uru arụmọrụ zuru oke nke ihe ọdịnala Al2O3 na BeO, aluminom nitride (AlN) seramiiki, nke nwere oke ikuku thermal (monocrystal's theoretical theormal conductivity) bụ 275W/m ▪k, polycrystal's theoretical theoremal conductivity bụ 70 ~ 210W ) , obere dielectric na-adịgide adịgide, ọnụọgụ mgbasawanye ọkụ na-ejikọta ya na otu silicon kristal, yana ezigbo mkpuchi ọkụ eletrik, bụ ihe dị mma maka ihe ntanetị na nkwakọ ngwaahịa na ụlọ ọrụ microelectronics.Ọ bụkwa ihe dị mkpa maka akwa seramiiki structural nke okpomọkụ n'ihi ezigbo ihe eji arụ ọrụ okpomọkụ dị elu, ihe ọkụ na nkwụsi ike kemịkal.
The theoretical density of AlN is 3.26g/cm3, MOHS hardness is 7-8, the room- okpomọkụ resistivity bụ ukwuu karịa 1016Ωm, na thermal expansivity bụ 3.5 × 10-6 / ℃ (ọnụ ụlọ okpomọkụ nke 200 ℃).ceramik AlN dị ọcha enweghị agba na nghọta, mana ha ga-abụ agba dị iche iche dị ka isi awọ, isi awọ ọcha ma ọ bụ edo edo, n'ihi adịghị ọcha.
Na mgbakwunye na ịdị elu thermal conductivity, AlN ceramics nwekwara uru ndị a:
1. Ezigbo mkpuchi eletrik;
2. Ọnụego mgbasawanye ọkụ yiri ya na silicon monocrystal, dị elu karịa ihe ndị dị ka Al2O3 na BeO;
3. Ike igwe dị elu na ike mgbanwe yiri ya na ceramics Al2O3;
4. Obere dielectric mgbe niile na ọnwụ dielectric;
5. Tụnyere BeO, thermal conductivity nke AlN ceramics bụ obere emetụta okpomọkụ, karịsịa n'elu 200 ℃;
6. Igwe ọkụ dị elu na nguzogide corrosion;
7. Na-adịghị egbu egbu;
8. A ga-etinye ya na ụlọ ọrụ semiconductor, ụlọ ọrụ metallurgy chemical na mpaghara mmepụta ihe ndị ọzọ.
Oge nzipu: Jul-14-2023